Intel Enhances High-NA EUV Collaboration with ASML
Intel Corporation (INTC) is fortifying its partnership with ASML (ASML) within the realm of High-NA Extreme Ultraviolet (EUV) lithography.
ASML has recently announced its commitment to collaborate with prominent semiconductor manufacturers—Intel, Nvidia (NVDA), TSMC (TSM), and Samsung Electronics—in the endeavor to innovate larger photomask technologies.
This initiative aims to propel the advancement of next-generation High-NA EUV systems, specifically tailored for the fabrication of expansive artificial intelligence (AI) and data center chips.
As it stands, ASML’s current EUV lithography apparatus can yield sizeable chips measuring approximately 800 square millimeters.
High-end processors from leading entities such as Nvidia are nearing this threshold, emphasizing the necessity for further enhancement.
While the cutting-edge High-NA EUV has the capability to achieve increased manufacturing precision, it is presently hindered by the limitations of existing photomask dimensions, which complicate the production of chips matching the surface area of current large-scale AI innovations.
To tackle this technical challenge, ASML has set its sights on the development of larger photomask technology, which will empower High-NA EUV to fabricate sizable data center chips in the foreseeable future.
Marco Pieters, ASML’s Chief Technology Officer, remarked that a successful industry transition to this upgrade could potentially elevate the production efficiency of High-NA EUV systems by approximately 40%.
The company is targeting a demonstration of a pilot production line by 2031, with ambitions to attain mass production readiness by 2033.
Intel stands at the forefront of the High-NA EUV adoption curve, emerging as a crucial ally for ASML. Notably, in 2024, Intel became the first company globally to install a commercial High-NA EUV system in Oregon, USA.
Furthermore, in July of this year, Intel Foundry harnessed this advanced technology to produce certain Panther Lake processors, leveraging the Intel 18A process node and initiating product shipments.
To date, Intel has processed an impressive total of over 1 million 300mm wafers utilizing High-NA EUV technology, encompassing those employed for tool validation, research and development, as well as actual production.

Currently, the firm continues to operate using standard-sized photomasks and is adeptly constructing larger chips through composite techniques, while actively engaging in the progression of next-generation large photomask solutions.
ASML underscored that the successful realization of large photomask technology not only stands to increase the chip dimensions that High-NA EUV can manufacture but could also enhance production efficiency by around 40%.
The company’s strategic roadmap includes establishing a pilot production line by 2031, with an objective of achieving mass production viability by 2033.
Source link: Tradingkey.com.






